tungsten hexafluoride (WF6)

Tungsten hexafluoride is a colorless gas with a pungent odor. Tungsten hexafluoride is mainly used as a transport and reaction gas for the deposition of tungsten thin films in the microelectronics industry.

Common synonyms: Tungsten(VI) fluoride

Properties of tungsten hexafluoride (WF6):

Reactivity: Tungsten hexafluoride is a highly reactive compound and can react violently with water, metals and flammable chemicals.
Melting point: The melting point of tungsten hexafluoride is -40.0°C.
Solubility: Tungsten hexafluoride is soluble in organic solvents such as benzene, ether and carbon tetrachloride.
Health risks: Tungsten hexafluoride is a toxic gas that can irritate the respiratory tract, skin and eyes. Prolonged exposure can cause lung damage and serious health problems.
Protection and prevention: It is important to handle tungsten hexafluoride in well-ventilated areas and to wear appropriate personal protective equipment, such as a respirator, goggles and nitrile gloves. In the event of exposure, it is advisable to consult a health care professional immediately.

> About these data

Formula	WF6
International name	tungsten hexafluoride
French name	Hexafluorure de tungstène
CAS	7783-82-6
EINECS	232-029-1
Filter	ARI
IP (eV)	15,53
Vapour density (air = 1)	-
Conversion (1 ppm =)	-
LIE
LSE
VLEP CT (15mn)
VLEP (8h)
STEL (15 min.)
TWA (8h)

Self-contained breathing apparatus for tungsten hexafluoride (WF6)

tungsten hexafluoride (WF6) is a toxic, asphyxiating gas with a high risk of suffocation, so we recommend an open-circuit breathing apparatus (ARICO), an air-supply system for long-duration operations and a self-rescue mask for emergency evacuations.